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Lieferstatus:	i.d.R. innert 14-24 Tagen versandfertig
Veröffentlichung:	August 2019
Genre:	Naturwissensch., Medizin, Technik
	Applied optics / B / Electronic devices & materials / Electronic materials / Laser / Lasers / Machines, Tools, Processes / Manufactures / Manufacturing, Machines, Tools, Processes / Microsystems and MEMS / Microwave technology / Microwaves / Microwaves, RF and Optical Engineering / Microwaves, RF Engineering and Optical Communications / Nanotechnology / Nanotechnology and Microengineering / Optical and Electronic Materials / Optical engineering / Optical Materials / Optical physics / Optics, Lasers, Photonics, Optical Devices / Other manufacturing technologies / Photonics / Physics and Astronomy / Production engineering / Semiconductors
ISBN:	9783030232986
EAN-Code:	9783030232986
Verlag:	Springer International Publishing
Einband:	Gebunden
Sprache:	English
Serie:	#288 - Springer Series in Materials Science
Dimensionen:	H 241 mm / B 160 mm / D 23 mm
Gewicht:	629 gr
Seiten:	308
Zus. Info:	HC runder Rücken kaschiert
Bewertung:	Titel bewerten / Meinung schreiben

Inhalt:

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.