Übersicht			Auf mobile öffnen

Lieferstatus:	Auf Bestellung (Lieferzeit unbekannt)
Veröffentlichung:	April 2002
Genre:	Naturwissensch., Medizin, Technik
	C / Chemical Engineering / Chemistry and Materials Science / Industrial Chemistry / Industrial chemistry & chemical engineering / Industrial Chemistry/Chemical Engineering / Materials—Surfaces / Physical Chemistry / Surface chemistry & adsorption / Surfaces and Interfaces, Thin Films / Surfaces, Interfaces and Thin Film / Thin films
ISBN:	9781402005251
EAN-Code:	9781402005251
Verlag:	Springer Nature EN
Einband:	Kartoniert
Sprache:	English
Dimensionen:	H 240 mm / B 160 mm / D 20 mm
Gewicht:	1190 gr
Seiten:	363
Bewertung:	Titel bewerten / Meinung schreiben

Inhalt:

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.