Übersicht			Auf mobile öffnen

Lieferstatus:	Auf Bestellung (Lieferzeit unbekannt)
Veröffentlichung:	Oktober 2010
Genre:	Naturwissensch., Medizin, Technik
	Applied optics / C / Chemistry and Materials Science / Electronic materials / Electronics / Electronics and Microelectronics, Instrumentation / Electronics engineering / engineering / Engineering# general / Engineering, general / Laser / Lasers / Microelectronics / Optical and Electronic Materials / Optical Materials / Optical physics / Optics, Lasers, Photonics, Optical Devices / Photonics / Technology and Engineering
ISBN:	9783642061523
EAN-Code:	9783642061523
Verlag:	Springer Nature EN
Einband:	Kartoniert
Sprache:	English
Serie:	Microtechnology and MEMS
Dimensionen:	H 235 mm / B 155 mm / D
Gewicht:	379 gr
Seiten:	232
Illustration:	XII, 232 p. 84 illus., schwarz-weiss Illustrationen
Zus. Info:	Previously published in hardcover
Bewertung:	Titel bewerten / Meinung schreiben

Inhalt:

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.