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Lieferstatus:	i.d.R. innert 7-14 Tagen versandfertig
Veröffentlichung:	August 2016
Genre:	Naturwissensch., Medizin, Technik
	B / Chemistry and Materials Science / Computer architecture & logic design / computer hardware / Computer memory systems / electrochemistry / Electronic devices & materials / Electronics / Electronics and Microelectronics, Instrumentation / Electronics engineering / Energy Grids and Networks / energy systems / Energy technology & engineering / Memory Structures / Microelectronics / Semiconductors / Storage media & peripherals
ISBN:	9781489979438
EAN-Code:	9781489979438
Verlag:	Springer Us
Einband:	Kartoniert
Sprache:	English
Dimensionen:	H 235 mm / B 155 mm / D 16 mm
Gewicht:	423 gr
Seiten:	276
Zus. Info:	Paperback
Bewertung:	Titel bewerten / Meinung schreiben

Inhalt:

This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes.